HVA 88200 Series Aluminum Rectangular Slit Valve
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The 88200 Series Direct Drive Rectangular Valves offer one of the smallest interior surface areas in the vacuum valve industry. In the open position, the seal plate O-ring is completely out of sight preventing any particulate or media flow to accumulate on the sealing surface. In the closed position the one piece solid block design prevents any material buildup on the back side of the valve mechanism dramatically reducing service and maintenance requirements. This valve is engineered to meet the mechanical interface and vacuum containment requirements of the industry. To meet the specific needs of modular integrated processing systems, the valves are designed to isolate vacuum pressure on either side of the gate. A narrow profile design, including both actuator and controller, allows tight mounting between central, load-lock, handling and process chambers.
PERFORMANCE & SPECIFICATIONS
- Vacuum
- Pressure Range: HV: 1×10-9 mbar
- Helium leak rate: <2×10-9 mbar I/s
- Bakeout Temperature
- Elastomer sealed bonnet: 150°C
- Actuator: 60°C
- Mechanism
- Solenoid: 4.3 Watts
- Pneumatic air service: 80 psig
- Technical Sheets
| PART NUMBER | Flange Style | Valve Dimensions (mm) | Connection Style | Mechanism Type | Bonnet Material | REQUEST FOR QUOTE |
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