HVA 81000 Series Aluminum Gate Valves
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The 81000 Series Aluminum Gate Valves are designed for high vacuum applications specifically when pressure ranges approximate 1 x 10-7 mbar and bakeout temperatures do not exceed 150°C. These valves are designed for system integrators, designers and OEM’s within the Semiconductor, Solar, LED/FPD, Coating and BioPharm industries due to their robust design and low cost. They feature precision machined high strength aluminum bodies from solid 6061-T6 billet, dual quad ring long life shaft seals and high performance PEEK components.
PERFORMANCE & SPECIFICATIONS
- Vacuum
- Pressure Range: 1x10-7 mbar
- Helium leak rate: <2×10-9 mbar I/s
- Bakeout Temperature
- Valve body and gate: 120°C
- Actuator: 80°C
- Technical Sheets
Flange Size
Mechanism Type
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