HVA 71000 Series Stainless Steel Harsh Process Gate Valves
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The 71000 Series HPV (Harsh Process Valves) are designed for the harshest of vacuum environments. In typical harsh applications like MOCVD, ALD, PECVD the valves are subject to aggressive chemicals and high temperatures. The byproducts can affect the operation of the wheels/bearings, linkages and can cause the valve to seize so our HPV addresses this issue with no moving parts and a bellows that stays isolated from the process. The valves feature a robust dual containment design for increased safety, sealed bellows isolated from process for less maintenance, easy in-situ cleaning and o-ring replacement for reduced downtime and an optional integrated soft pump feature for lower particles.
PERFORMANCE & SPECIFICATIONS
- Vacuum
- Pressure Range: 1 ×10-9 mbar
- Helium leak rate: <2×10-9 mbar I/s
- Temperature
- Body: 150°C
- Actuator: 100°C
- Mechanism
- Manual: hand crank
- Pneumatic air service: 55-80 psig
- Technical Sheets
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