Hiden Analytical ESPion
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The Hiden ESPion system employs Orbital Motion Limited (OML) and Allen Boyd Reynolds (ABR) as standard plasma analysis models. The automatic Z-drive provides for spatially resolved measurements across the plasma volume. The standard Z-drive translation options are: 300, 600 and 900 mm.
PERFORMANCE & SPECIFICATIONS
- Benefits
- 15 scans per sec acquisition rate with D-O-E interface for auto, semi or manual analysis
- Hiden pioneers in passive RF compensation
- ESPion has the highest blocking impedance of any commercially available unit
- 4.25MOhm at 13.56 MHz cf. 100kOhm
- 300, 600, 915mm auto linear drive options
- Technical Sheet: