Hiden Analytical EQS SIMS Analyzer
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The Hiden EQS is a high transmission electrostatic quadrupole secondary ion mass spectrometer (SIMS) is one of our most popular detection systems for research-scale thin film nanoscale surface analysis. The EQS SIMS analyzer is an ideal add-on analyzer for XPS and focused ion beam FIB microscopy systems.
PERFORMANCE & SPECIFICATIONS
- Benefits
- High sensitivity pulse ion counting detector with 7 decade dynamic rnage
- Raster control for enhanced depth profiling and imaging with integrated signal gating
- 45º Electrostatic sector analyzer, scan energy at 0.05 eV increments/ 0.25 eV FWHM
- Technical Sheet: