Bruker Optic Cryogenic Silicon Analysis System: CryoSAS
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The Bruker Optics` Cryogenic Silicon Analysis System (CryoSAS) is a dedicated all-in-one system for the low temperature (< 15 K) impurity analysis of Silicon. CryoSAS is optimized for operation in the industrial environment. CryoSAS combines Bruker's high performance FT-IR spectrometers with built-in, closed-cycle cryo-cooling technique that does not require any liquid Helium. All CryoSAS components are state-of-the-art, yet utilize proven technologies to accomplish a difficult analysis in the demanding silicon production environment. CryoSAS can be operated at a high level of automation including accurate reporting of the analysis results.
PERFORMANCE & SPECIFICATIONS
- Benefits
- High Sensitivity: CryoSAS analyzes shallow impurities (e.g. Boron, Phosphorous etc.) down to the low ppta level according to the ASTM/SEMI MF1630 standard
- Stainless steel sample chamber design for easy sample access
- Dry fore pump and turbo pump for simple and clean vacuum system operation
- Robust, precision stepper motor range stage with nine position sample holder