COPRA IS1100x250-GRPE

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The COPRA IS1100x250-GRPE Built In Plasma Source have from the origin been designed for the assist of nearly any kind of PVD deposition processes.The unique design allows you also to integrate the COPRA IS1100x250-GRPE Built In Plasma Source completely inside vacuum in your existing Inline- or R2R-Coater in order to e.g. pre treat or oxidize your substrates. The COPRA IS1100x250-GRPE Built In Plasma Source is also easy to scale in size and power if requested. Please see the IS-custom design site.

PERFORMANCE & SPECIFICATIONS

  • Benefits
    • Plasma Opening:1100x250 mm
    • Plasma: Neutral Plasma Beam (no filament)
    • Impedance Match: Integrated Remote Match
    • Pressure Range: 5x10-4 to 1x10-2 mbar