SDE120TX, Max Pumping Speed 1500

The Kashiyama® SDE Dry Vacuum Pump series is a durable, long lasting dry vacuum pump for any process application. The SDE is a large dry vacuum pump allowing for increased wafer and FPD substrate sizes. SDE Series are used for harsh duty and lock applications.
Max. Pumping Speed [L/min]*1: 1500.0
Ultimate Pressure [Pa]*1: 1.3
Supply Voltage (50/60Hz): 3Phase AC200～220V, 380～480V
Power Consumption [kW]*2: 2.80