3000 Ion Source
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The Gridless End-Hall Ion Sources have been specially developed to provide a cost effective solution for ion assisted vacuum processes from small to large sized deposition systems. The sources provide an extremely reliable and maintenance-free up to 3kW source for many applications in PVD processes. The compact design and rugged construction allows easy installation to both new and existing vacuum deposition systems.
PERFORMANCE & SPECIFICATIONS
- Benefits
- Source Diameter: 114mm diameter by 93mm long (4.49” x 3.66”)
- Source Weight:4 kgs (approx. 8.5 lbs)
- Beam Power: Anode volts selectable to 300 volts; anode power 3000W
- Anode Current: Maximum 10 amps under manual or automatic beam control
- Beam Divergence: Wide beam divergence in excess of 80 degrees
- Gas Flow: Approximately 8sccm argon required to produce 2 amps (typical)
- Cooling Water: Minimum 4.5 liters/minute. Water flow is constantly monitored
- Power Unit Dimensions: 180mm x 525mm x 435mm
- Power Unit Weight: 30 kgs (66lbs)
- Technical Sheets